Research on the Cutting-edge Applications of MEMS Technology in Inertial Sensing Systems
DOI:
https://doi.org/10.61173/zm94pp09Keywords:
MEMS, Inertia sensor, Accelerometer, GyroscopeAbstract
MEMS technology is a high-tech that has developed rapidly in recent years, the technology integrates multiple components such as microsensors, microactuators, signal processing, and control circuits, and has significant advantages such as small size, low power consumption, high accuracy, and low cost. In this paper, the cutting-edge applications of MEMS technology in inertial sensing systems are discussed. The design principles and technical classification of MEMS inertial sensors are introduced. Some application examples of MEMS inertial sensors in navigation, positioning, control, and other fields are analyzed. The development trends and challenges of MEMS inertial sensing systems are discussed. The cutting-edge application of MEMS technology in inertial sensing systems has far-reaching technical, economic, and social significance. With the continuous progress of technology and the continuous expansion of application fields, MEMS inertial sensing technology will play a more important role and make greater contributions to the progress and development of human society.References
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