CHEN, Zhizhong. Development and Outlook of Extr eme Ultraviolet (EUV) Lithography Technology. Science and Technology of Engineering, Chemistry and Environmental Protection, [S. l.], v. 4, n. 1, p. 15232, 2026. DOI: 10.61173/vz229f32. Disponível em: https://stecep.deanfrancis.press/article/view/1891. Acesso em: 16 oct. 2026.