WEN, Junyi. Application of Photolithography and Etching Processes in Digital Integrated Circuit Manufacturing. Science and Technology of Engineering, Chemistry and Environmental Protection, [S. l.], v. 4, n. 1, p. 14472, 2026. DOI: 10.61173/55d1r117. Disponível em: https://stecep.deanfrancis.press/article/view/328. Acesso em: 4 nov. 2026.